TOF-SIMS is an acronym for the combination of the analytical technique SIMS (Secondary Ion Mass Spectrometry) with Time of Flight mass analysis (TOF). In different operational modes - surface spectroscopy, surface imaging, depth profiling, 3D analysis - this analysis technique offers unique features:

Information obtained

• Detection of all elements and isotopes
• Chemical information via molecular andcluster ions

Detection limits

• PPM of a monolayer for elements
• Sub-fmol for molecules

Detection limits

• High lateral resolution (<60nm)
• High surface sensitivity (<1nm)
• High depth resolution (<1nm)